Want to learn more about NanoQI? Download our public reports.
If you want to learn more about the project and take deeper dive into the results and outcomes, you can consult our publicly available deliverables & publications, which can be found in the KNOWLEDGE BASE & PUBLICATIONS page with many new updates expected during the final year of the project.
The documents currently available include: “Common interface description for machine integration of in-line and in-situ metrology”, which introduces the basis of the project by summarizing the integration concept of the X-ray analysis and Hyperspectral Imaging into thin film processing machines and the complementary “Whitepaper and teaching material on machine and radiation safety of inline-insitu X-ray + HSI units“.