The project NanoQI developed an industry-suited, real-time and in-line technique to characterize nano-structure and nano-dimensions of  thin-film materials. We optimized area-detector-based XRR and XRD concepts and combined them with a novel hyper-spectral imaging (HSI) technique. 

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Our Applications

NanoQI technology was demonstrated in three relevant industrial application scenarios: in-situ process assessment in manufacturing of perovskite solar cells; large-area vacuum roll-to-roll coating of polymer webs and industrial atomic layer deposition of dielectric and gas barrier layers.

Thermal curing of perovskite films


R2R vacuum deposition


Layer growth monitoring in ALD