The project NanoQI targets the development of an industry-suited, real-time and in-line capable technique to characterise nano-structure and nano-dimensions of (thin-film) nano-materials by optimisation of area-detector based XRR and XRD concepts and their multi-modal combination with a novel visual-light hyper-spectral imaging (HSI) technique.

Our Applications

NanoQI technology will be demonstrated in three relevant industrial application scenarios: in-situ process assessment in manufacturing of perovskite solar cells; large-area vacuum roll-to-roll coating of polymer webs and industrial atomic layer deposition of dielectric and gas barrier layers.

Thermal curing of perovskite films

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R2R vacuum deposition

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Layer growth monitoring in ALD

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