NanoQI: New methodology for large-area & high-speed measurements of nano-materials
Multi-modal combination of high-speed X-ray diffraction (XRD) and reflectivity (XRR) methods with hyper-spectral imaging (HSI) technology for nano-scale in-line and large-area quality control and process development of thin film materials
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Venue location
Conference Center – High Tech Campus Eindhoven
High Tech Campus 1-E, The Strip
5656 AE Eindhoven
The Netherlands